INVESTIGATION OF NIO THIN FILM BY SPUTTERING FOR GAS SENSING APPLICATIONS
Year: 2014
Authors: Baratto C., Raj Kumar, Faglia G., Sberveglieri, G. Bontempi E. Borgese L.
Autors Affiliation: 1CNR-IDASC SENSOR Lab. and University of Brescia, Dept. of Information Engineering, Via Valotti, 9 25133 Brescia, Italy
2 INSTM and Chemistry for Technologies Laboratory, University of Brescia, Department of Mechanical and Industrial Engineering,Via Branze, 38 25133 Brescia, Italy
Journal/Review: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS
KeyWords: Gas sensing; NiO; sputtering
