High-resolution angular and displacement sensing based on the excitation of surface plasma waves

Year: 1997

Authors: Margheri G., Mannoni A., Quercioli F.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, Firenze 50125, Italy

Abstract: The possibility of building angular and displacement sensors based on the phenomenon of attenuated total reflection (ATR) is explored both numerically and experimentally. ATR occurs when a surface wave is excited by an incoming TM electromagnetic wave through a resonant phase-matching process, as in the Kretschmann coupling scheme. The reflected intensity strongly depends on the angle of incidence of the beam. We first show some computations of the sensitivity and the linearity of an ATR-based sensor, then proceed to the experiment, illustrating how an angular resolution of the order of 0.1 are sec can be obtained with moderate effort. Finally me show how the sensor, combined with a simple optical arrangement, can be used to detect and measure nanometric displacements, as those provided by piezoelectric actuators.

Journal/Review: APPLIED OPTICS

Volume: 36 (19)      Pages from: 4521  to: 4525

KeyWords: Actuators; Angle measurement; Computational methods; Distance measurement; Light absorption; Light reflection; Piezoelectric devices; Plasma waves; Sensitivity analysis; Surface waves, Angular sensors; Attenuated total reflection; Displacement sensors, Optical sensors
DOI: 10.1364/AO.36.004521

Citations: 29
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