Optical profilometer with a standalone scanning sensor head

Year: 2001

Authors: Bartoli A., Poggi P., Quercioli F., Tiribilli B., Vassalli M.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: The use of compact disc (CD) pickups as distance sensors in optical profilometry is a well-established practice. The novelty of our device is the use of the built-in objective lens-tracking actuator of the pickup to perform a 1-D beam scanning of the sample. The profilometer prototype presented in this paper is made up of a standalone sensor-actuator optical head that can be easily positioned on samples of complex shapes with every orientation and can be operated by a remote control system. When 2-D scanning is unnecessary or even impossible, as for surface quality inspection of bulky mechanical pieces, a device that uses a CID pickup as both the sensor and the actuator is cheaper, faster, lighter, more compact, and more versatile than standard object-scanning setups that use xy translation stages. A lateral scan range of 800 mum and a vertical scan range of 160 mum are achieved. (C) 2001 Society of Photo-Optical Instrumentation Engineers.

Journal/Review: OPTICAL ENGINEERING

Volume: 40 (12)      Pages from: 2852  to: 2859

More Information: This work was partially supported by the European Community (Brite Euram Project ‘‘SMARTMEC’’ BE96-3743).
KeyWords: Actuators; Compact disks; Optical sensors; Optical systems; Profilometry; Remote control; Scanning, Scanning sensor heads, Optical instruments
DOI: 10.1117/1.1417494

ImpactFactor: 0.997
Citations: 6
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