Scientific Results

Absolute planarity with multiple measurements and iterative data reduction algorithm

Year: 2009

Authors: Vannoni M., Molesini G.

Autors Affiliation: CNR-Istituto Nazionale di Ottica Applicata

Journal/Review: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS

KeyWords: Optical metrology; absolute planarity; optical testing; iterative algorithm;