Wave front aberration analysis in two beam reversal shearing interferometry by elliptical Zernike polynomials

Year: 2004

Authors: De Nicola S., Ferraro P., Finizio A., Pierattini G., Grilli S., Gurov I, Chugunov V.

Autors Affiliation: Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Napoli, Via Pietro Castellino 111, 80131 Napoli, Italy;
Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto Nazionale di Ottica Applicata, Sez. di Napoli, c/o Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Institute of Fine Mechanics and Optics (Technical University), 14 Sablinskaya str., Siant Petersburg, 197101 Russia

Abstract: We present a modal phase-reconstruction method for analyzing wave front aberrations of rotationally symmetric optical components in two beam shearing interferometry. The optical configuration requires only two mutually coherent off-axis plane wave fronts transmitted through or reflected by the optical component under test. Finite moire beating between the interferograms and the CCD array is used to subtract the linear carrier introduced by defocus and the tilt making the presence of high order aberrations more evident. The difference wave front is described by elliptical Zernike polynomials as a function of the amount of lateral displacement between the two aberrated wave fronts. The method allows for accurate wave front reconstruction inside the quasi-elliptical overlap area between the laterally sheared interfering bean-is. Results of numerical experiments and applications of the technique for measuring aberrations of simple biconvex spherical lenses are presented.

Journal/Review: PROCEEDINGS OF SPIE

Volume: 5481      Pages from: 27  to: 36

KeyWords: interferometry
DOI: 10.1117/12.558183

Citations: 10
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