The First 3-D-Printed z-Axis Accelerometers With Differential Capacitive Sensing
Year: 2018
Authors: Zega V., Credi C., Bernasconi R., Langfelder G., Magagnin L., Levi M., Corigliano A.
Autors Affiliation: Politecn Milan, I-20133 Milan, Italy; Politecn Milan, Mat Engn, I-20133 Milan, Italy; Politecn Milan, Surface Engn & Mat Elect, I-20133 Milan, Italy; Politecn Milan, Dept Chem Mat & Chem Engn Giulio Natta, I-20133 Milan, Italy; Politecn Milan, Printing Lab 3D 1, LAB, I-20133 Milan, Italy; Politecn Milan, Design Sch, Several Courses Mat Sci & Technol, I-20133 Milan, Italy; Politecn Milan, Ind Engn & Informat Sch, I-20133 Milan, Italy; Politecn Milan, Dept Civil & Environm Engn, Solids & Struct Mech, I-20133 Milan, Italy.
Abstract: In this paper, additive manufacturing and wet metallization process are combined to fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart combination of existing fabrication processes makes the proposed fabrication flow unique in the sensors field. The mechanical design of the three proposed devices exploits the threedimensionality of the 3-D-printing technique and the electrostatic differential readout is allowed thanks to the wet-metallization process of the printed structure. Experimental measurements show a very good agreement with theoretical predictions thus proving a good reliability of the proposed design flow and fabrication process. With their relative small footprints (minimum dimension in the order of hundreds of mu m), good performances (sensitivity > 12 fF/g, sub % linearity error up to 11 g of full scale and theoretical noise estimation of few tens of ng/root Hz) and high customizability, they represent an important step toward novel application fields of inertial sensors.
Journal/Review: IEEE SENSORS JOURNAL
Volume: 18 (1) Pages from: 53 to: 60
More Information: The work of V. Zega and A. Corigliano was supported by the National Project under Grant PRIN15 n. 2015LYYXA8.KeyWords: Electro-mechanical systems; differential z-axis accelerometer; 3D-printing; wet metallizationDOI: 10.1109/JSEN.2017.2768299ImpactFactor: 3.076Citations: 31data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2024-11-10References taken from IsiWeb of Knowledge: (subscribers only)
