Scientific Results – CNR – Istituto Nazionale di Ottica

Non destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch

Year: 2005

Authors: Striano V., Coppola G., Ferraro P., Alfieri D., De Nicola S., Finizio A., Pierattini G., Marcelli R., Mezzanotte P.

Autors Affiliation: Istituto per la Microelettronica e Microsistemi � Sez. Napoli, Via P. Castellino, 111 � 80131, Napoli
(Italy);
Istituto Nazionale di Ottica Applicata, Sez. Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto di cibernetica del CNR, �E.Caianiello�, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto per la Microelettronica e Microsistemi � Sez. Roma, Via del Fosso del Cavaliere 100, 00133 Roma, Italy;
Universit� degli studi di Perugia – Via G.Duranti 93, 06125 Perugia, Italy

Abstract: A digital holographic microscope (DHM) is employed as non-invasive metrological tool for inspection and
characterization of a micromechanical shunt switches in coplanar waveguide configuration (CPW) for microwave
applications. The switch is based on a bridge that can be actuated by using electrodes positioned laterally with respect to
the central conductor of the CPW. The DHM features, such as speed, contact-less and non-destructivity, have allowed a
full characterization of an electrical actuated shunt switches. In particular, the out-of-plane deformation of the bridge due
to the applied voltage has been investigated with high accuracy. DHM inspection allows to investigate the shape of the
bridge during the actuation, the total warpage due to the actuation, possible residual gap, possible hysteresis, and so on.
These characterizations have been carried out both in static and in dynamic condition. In full paper the complete
characterization will be reported together with an accurate description of the optical system employed for the
investigation.

Journal/Review: PROCEEDINGS OF SPIE

Volume: 5858 Pages from: 585815-1 to: 585815-9

KeyWords: Digital holography Microscope; MEMS characterization; micromechanical shunt switches; microwave device;