Optical surface profile transducer
Year: 1988
Authors: Quercioli F., Tiribilli B., Molesini G.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: A noncontacting electro-optical probe is presented that is capable of monitoring the surface height of a sample in ranges of interest for mechanical tooling machines. The surface microtopography is reconstructed after scanning. The working principle is based on monotonic longitudinal chromatic aberration of a lens. Characteristics of a designed lens are reported, along with interferometric testing data on a fabricated prototype. Calibration curves of the complete device are given. After interfacing to a personal computer, automatic probing and scanning are implemented. Results on selected samples are presented.
Journal/Review: OPTICAL ENGINEERING
Volume: 27 (2) Pages from: 135 to: 142
KeyWords: Electrooptical devices; Lenses – Design; Optical instruments; Transducers, Automatic probing; Chromatic aberration; Electrooptical probe; Mechanical tooling machines; Surface profile; SurfacesDOI: 10.1117/12.7976658Citations: 8data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2024-11-10References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here